Luminescent Technologies

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Initial Investment:

2007

Exit Summary:

Acquired by KLA-Tencor in 2014

Headquarters:

Palo Alto, California

Industry Segment:

Semiconductor

Discontinuity:

Technology

Overview:

Luminescent Technologies supplied products to the semiconductor industry that enabled precise on-wafer pattern fidelity, large process windows and short time to silicon for accelerated yield ramps, superior design tolerance and favorable IC economics. The Company's computational lithography and defect management solutions, based upon breakthrough Inverse Lithography Technology (ILT) used sophisticated mathematical methods and innovative software algorithms to rigorously solve for the optimal semiconductor lithography and inspection processes.

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